@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

<https://data.amerigeoss.org/dataset/2996dee6-2e47-4eec-957b-350514d793a4> a dcat:Dataset ;
    dct:description "Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry" ;
    dct:identifier "7CE906EBFAD7231EE0532457068153892009" ;
    dct:issued "2025-09-24T17:37:12.982090"^^xsd:dateTime ;
    dct:language "{en}" ;
    dct:modified "2018-12-01"^^xsd:date ;
    dct:publisher <https://data.amerigeoss.org/organization/727dbdd5-3f98-4ac0-9d28-5e344558139b> ;
    dct:title "X-ray Metrology for the Semiconductor Industry Tutorial" ;
    dcat:contactPoint [ a vcard:Organization ;
            vcard:fn "Regis Kline" ;
            vcard:hasEmail <mailto:r.kline@nist.gov> ] ;
    dcat:distribution <https://data.amerigeoss.org/dataset/2996dee6-2e47-4eec-957b-350514d793a4/resource/a361ea67-5045-440c-a073-dbc6af69a1b4> ;
    dcat:keyword "AmeriGEO",
        "AmeriGEOSS",
        "CKAN",
        "GEO",
        "GEOSS",
        "National",
        "North America",
        "United States",
        "dimensional-metrology",
        "semiconductor-metrology",
        "small-angle-x-ray-scattering" ;
    dcat:theme <%22Metrology:Dimensional%20metrology%22>,
        <%7BNanotechnology:Nanoelectronics>,
        <Electronics:Semiconductors>,
        <Nanotechnology:Nanometrology%7D> .

<https://data.amerigeoss.org/dataset/2996dee6-2e47-4eec-957b-350514d793a4/resource/a361ea67-5045-440c-a073-dbc6af69a1b4> a dcat:Distribution ;
    dct:description "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial" ;
    dct:format "HTML" ;
    dct:issued "2021-03-11T17:21:01.495820"^^xsd:dateTime ;
    dct:modified "2025-09-24T17:37:12.965518"^^xsd:dateTime ;
    dct:title "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial" ;
    dcat:accessURL <https://doi.org/10.18434/T4/1503330> .

<https://data.amerigeoss.org/organization/727dbdd5-3f98-4ac0-9d28-5e344558139b> a foaf:Agent ;
    foaf:name "US Migrating" .