This data set consists of several files that were created to accompany M.o.R., a shiny app created by the Surface & Nanostructure Metrology Group in the Engineering Physics Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology. It was created to simplify model-based metrology. A detailed explanation of the proper usage can be found in the M.o.R. documentation.
An example data set to demonstrate the usage of M.o.R., a shiny app for model-based metrology.
DOI Access for 'An example data set to demonstrate teh usage of M.o.R., a shiny app for model-based metrology'