NIST MEMS Calculator - SRD 166
type: Dataset
description: This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.
keyword: amerigeo
keyword: amerigeoss
keyword: astm
keyword: cantilevers
keyword: ckan
keyword: data-analysis-sheets
keyword: fixed-fixed-beams
keyword: geo
keyword: geoss
keyword: height-measurements
keyword: interferometries
keyword: length-measurements
keyword: mems-5-in-1
keyword: mems-calculators
keyword: micro-electro-mechanical-systems
keyword: national
keyword: north-america
keyword: residual-strains
keyword: residual-stresses
keyword: semiconductor-equipment-and-materials-international
keyword: standard-reference-material
keyword: steps
keyword: strain-gradients
keyword: stress-gradients
keyword: test-structures
keyword: thick
keyword: united-states
keyword: vibrometries
keyword: youngs-modulus-measurements
issued: 2025-11-21T14:20:39.040563
modified: 2014-05-22T00:00:00
language: {en}
theme: Reference materials"
theme: Semiconductors
theme: Reference data"}
contact point: Organization
  fn: Richard A. Allen

US Migrating
type: Agent

DOI Access to NIST MEMS Calculator - SRD 166
type: Distribution
description: DOI Access to NIST MEMS Calculator - SRD 166
media type: text/html
format: HTML
access URL: https://dx.doi.org/10.18434/T4CS3T
issued: 2022-08-07T17:58:13.391876
modified: 2025-11-21T14:20:39.026127