@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

<https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f> a dcat:Dataset ;
    dct:description "Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with more than 10^4 actuators that have size, weight, and power specifications that are far lower than conventional piezoelectric and electrostrictive DMs. However, considerable development is necessary to take state-of-the-art DMs today and make them flight-like. This Phase I SBIR proposal addresses two critical areas in MEMS DM development towards the goal of developing flight-like hardware. Namely, Phase I research will further develop Iris AO's proven hybrid MEMS DM technology to: 1) make a critical assembly step in the fabrication process scalable to wafer scales and 2) increase drive electronics resolution to 16 bits while simultaneously reducing power requirements more than three-fold over existing 14-bit resolution electronics. The increased spatial and actuator resolution afforded by the development here will enable picometer resolution DMs required to reach 10^10 contrast levels necessary for direct detection of Earth-sized terrestrial planets." ;
    dct:identifier "519be74d-2d72-4322-83f0-e77dbb4d5d0f" ;
    dct:issued "2025-11-29T20:09:22.763703"^^xsd:dateTime ;
    dct:modified "2025-11-29T20:09:22.763707"^^xsd:dateTime ;
    dct:publisher <https://data.amerigeoss.org/organization/727dbdd5-3f98-4ac0-9d28-5e344558139b> ;
    dct:title "Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase I" ;
    dcat:contactPoint [ a vcard:Organization ;
            vcard:fn "TECHPORT SUPPORT" ;
            vcard:hasEmail <mailto:hq-techport@mail.nasa.gov> ] ;
    dcat:distribution <https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/1eb14511-f788-4126-911f-b35e6e40c046>,
        <https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/5734f3b6-05d9-4eb1-8c9e-f11122ad661d>,
        <https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/71fab6cd-17ca-4899-81ca-70e20ce087ab>,
        <https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/85dea84d-a988-40a0-b82f-76a932ebe4d1> ;
    dcat:keyword "amerigeo",
        "amerigeoss",
        "ckan",
        "geo",
        "geoss",
        "national",
        "north-america",
        "united-states" .

<https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/1eb14511-f788-4126-911f-b35e6e40c046> a dcat:Distribution ;
    dct:description "Techport Project JSON Metadata" ;
    dct:format "HTML" ;
    dct:issued "2018-08-01T15:45:33.603349"^^xsd:dateTime ;
    dct:modified "2025-11-29T20:09:22.756564"^^xsd:dateTime ;
    dct:title "Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase I" ;
    dcat:accessURL <https://techport.nasa.gov/api/projects/93478> ;
    dcat:mediaType "text/html" .

<https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/5734f3b6-05d9-4eb1-8c9e-f11122ad661d> a dcat:Distribution ;
    dct:description "Techport Project Page" ;
    dct:format "HTML" ;
    dct:issued "2018-08-01T15:45:33.603331"^^xsd:dateTime ;
    dct:modified "2025-11-29T20:09:22.755972"^^xsd:dateTime ;
    dct:title "Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase I" ;
    dcat:accessURL <https://techport.nasa.gov/view/93478> ;
    dcat:mediaType "text/html" .

<https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/71fab6cd-17ca-4899-81ca-70e20ce087ab> a dcat:Distribution ;
    dct:description "Techport Project PDF Export" ;
    dct:format "HTML" ;
    dct:issued "2018-08-01T15:45:33.603356"^^xsd:dateTime ;
    dct:modified "2025-11-29T20:09:22.757415"^^xsd:dateTime ;
    dct:title "Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase I" ;
    dcat:accessURL <https://techport.nasa.gov/datasheet/93478> ;
    dcat:mediaType "text/html" .

<https://data.amerigeoss.org/dataset/519be74d-2d72-4322-83f0-e77dbb4d5d0f/resource/85dea84d-a988-40a0-b82f-76a932ebe4d1> a dcat:Distribution ;
    dct:description "Techport Project XML Metadata" ;
    dct:format "HTML" ;
    dct:issued "2018-08-01T15:45:33.603353"^^xsd:dateTime ;
    dct:modified "2025-11-29T20:09:22.757010"^^xsd:dateTime ;
    dct:title "Fabrication Process and Electronics Development for Scaling Segmented MEMS DMs, Phase I" ;
    dcat:accessURL <https://techport.nasa.gov/api/projects/93478.xml> ;
    dcat:mediaType "text/html" .

<https://data.amerigeoss.org/organization/727dbdd5-3f98-4ac0-9d28-5e344558139b> a foaf:Agent ;
    foaf:name "US Migrating" .

