2 datasets found

Groups: North America Tags: test-structures

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  • NIST MEMS Calculator - SRD 166

    This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed...

  • NIST MEMS Calculator - SRD 166

    This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed...
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