NIST MEMS Calculator - SRD 166

This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

Data and Resources

Field Value
accessLevel public
accrualPeriodicity irregular
bureauCode {006:55}
catalog_@context https://project-open-data.cio.gov/v1.1/schema/data.json
catalog_conformsTo https://project-open-data.cio.gov/v1.1/schema
catalog_describedBy https://project-open-data.cio.gov/v1.1/schema/catalog.json
identifier FDB5909746905200E043065706813E54152
landingPage http://pml.nist.gov/test-structures/MEMSCalculator.htm
language {en}
license https://www.nist.gov/open/license
modified 2014-05-22 00:00:00
programCode {006:052}
publisher National Institute of Standards and Technology
references {http://pml.nist.gov/test-structures/10-FilesToDownload/FCMN.2013.pdf,http://pml.nist.gov/test-structures/10-FilesToDownload/ICMTS.2012.pdf,https://www.nist.gov/news-events/news/2013/04/new-nist-measurement-tool-target-fast-growing-mems-industry,http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=914939,http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=909186,https://dx.doi.org/10.6028/NIST.SP.260-177}
resource-type Dataset
source_datajson_identifier true
source_hash f45c3632e00a56decd1dc4cffbda92bcfc65238e
source_schema_version 1.1
theme {"Standards:Reference materials",Electronics:Semiconductors,"Standards:Reference data"}
Groups
  • AmeriGEOSS
  • National Provider
  • North America
Tags
  • AmeriGEO
  • AmeriGEOSS
  • CKAN
  • GEO
  • GEOSS
  • National
  • North America
  • United States
  • astm
  • cantilevers
  • data-analysis-sheets
  • fixed-fixed-beams
  • height-measurements
  • interferometries
  • length-measurements
  • mems-5-in-1
  • mems-calculators
  • micro-electro-mechanical-systems
  • residual-strains
  • residual-stresses
  • semiconductor-equipment-and-materials-international
  • standard-reference-material
  • steps
  • strain-gradients
  • stress-gradients
  • test-structures
  • thick
  • vibrometries
  • youngs-modulus-measurements
isopen False
license_id other-license-specified
license_title other-license-specified
maintainer Richard A. Allen
maintainer_email richard.allen@nist.gov
metadata_created 2025-09-24T07:12:22.087080
metadata_modified 2025-09-24T07:12:22.087091
notes This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.
num_resources 1
num_tags 29
title NIST MEMS Calculator - SRD 166