Text File
URL: https://data.nist.gov/od/ds/ark:/88434/mds2-2450/LDVData/W2_29_G_m01.xlsx.sha256
Dataset description:
SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports...
Source: Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
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Additional Information
| Field | Value |
|---|---|
| Data last updated | August 7, 2022 |
| Metadata last updated | November 21, 2025 |
| Created | August 7, 2022 |
| Format | TEXT |
| License | other-license-specified |
| Datastore active | False |
| Has views | False |
| Id | eb5bbddd-cce8-4bfd-878f-e0889dd99a07 |
| Mimetype | text/plain |
| No real name | True |
| Package id | 537a28e7-56fa-4033-b312-ec29c859e2dc |
| Position | 56 |
| State | active |