Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness

SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.

Data and Resources

Field Value
accessLevel public
accrualPeriodicity irregular
bureauCode {006:55}
catalog_@context https://project-open-data.cio.gov/v1.1/schema/data.json
catalog_conformsTo https://project-open-data.cio.gov/v1.1/schema
catalog_describedBy https://project-open-data.cio.gov/v1.1/schema/catalog.json
identifier ark:/88434/mds2-2450
landingPage https://data.nist.gov/od/id/mds2-2450
language {en}
license https://www.nist.gov/open/license
modified 2021-08-26 00:00:00
programCode {006:045}
publisher National Institute of Standards and Technology
references {https://doi.org/10.1063/1.2764372,https://doi.org/10.1088/0957-0233/17/10/041,https://doi.org/10.1088/0957-4484/23/37/375702}
resource-type Dataset
rights Purchase is not required for data downloading. Users must complete registration form to download data.
source_datajson_identifier true
source_hash 6fc5c4d555e8195e95061a31625d0bea6db92d6b
source_schema_version 1.1
theme {"Metrology:Acoustic/vibration metrology","Metrology:Force metrology",Nanotechnology:Nanofabrication/manufacturing,Nanotechnology:Nanomechanics}
Groups
  • AmeriGEOSS
  • National Provider
  • North America
Tags
  • amerigeo
  • amerigeoss
  • cantilever
  • ckan
  • geo
  • geoss
  • laser-doppler-vibrometer
  • ldv
  • mems
  • national
  • north-america
  • srm-3461
  • stiffness
  • united-states
isopen False
license_id other-license-specified
license_title other-license-specified
maintainer William Alexander Osborn
maintainer_email william.osborn@nist.gov
metadata_created 2025-11-21T17:50:38.847145
metadata_modified 2025-11-21T17:50:38.847149
notes SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.
num_resources 388
num_tags 14
title Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness