Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.

Data and Resources

Field Value
Groups
  • AmeriGEOSS
  • National Provider
  • North America
Tags
  • amerigeo
  • amerigeoss
  • ckan
  • geo
  • geoss
  • national
  • north-america
  • united-states
isopen False
license_id other-license-specified
license_title other-license-specified
maintainer William Osborn
maintainer_email william.osborn@nist.gov
metadata_created 2025-11-30T10:04:09.651016
metadata_modified 2025-11-30T10:04:09.651021
notes These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.
num_resources 14
num_tags 8
title Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds