Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.

Data and Resources

Field Value
accessLevel public
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identifier 77D21EEB60F37A2BE053245706819FDB1978
landingPage https://data.nist.gov/od/id/77D21EEB60F37A2BE053245706819FDB1978
language {en}
license https://www.nist.gov/open/license
modified 2018-10-17
programCode {006:045}
publisher National Institute of Standards and Technology
resource-type Dataset
source_datajson_identifier true
source_hash 593bbff6e71d93b84622fbca53ee925badbd45b7
source_schema_version 1.1
theme {"Materials:Materials characterization",Nanotechnology:Nanomechanics,Nanotechnology:Nanometrology,Electronics:Semiconductors}
Groups
  • AmeriGEOSS
  • National Provider
  • North America
Tags
  • amerigeo
  • amerigeoss
  • background-subtraction
  • ckan
  • ebid
  • ebsd
  • electron-back-scatter-diffraction
  • electron-beam-induced-deposition
  • flat-field
  • geo
  • geoss
  • national
  • north-america
  • pt
  • united-states
  • w_
isopen False
license_id other-license-specified
license_title other-license-specified
maintainer William Osborn
maintainer_email william.osborn@nist.gov
metadata_created 2025-11-22T07:15:05.358852
metadata_modified 2025-11-22T07:15:05.358856
notes These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.
num_resources 14
num_tags 16
title Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds