Silicon Micromachining for Millimeter- and...
URL: https://techport.nasa.gov/datasheet/93260
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Additional Information
| Field | Value |
|---|---|
| Data last updated | November 12, 2020 |
| Metadata last updated | November 19, 2025 |
| Created | November 12, 2020 |
| Format | HTML |
| License | License not specified |
| Datastore active | False |
| Has views | True |
| Id | 5a31582d-16a0-4b42-8a7c-6a6c7494ccf9 |
| Mimetype | text/html |
| Package id | 0e7ede2c-8b52-4443-af21-5aeaff99cde8 |
| Position | 3 |
| State | active |