Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.

Data e Risorse

Campo Valore
accessLevel public
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identifier ark:/88434/mds2-3116
issued 2024-02-09
landingPage https://data.nist.gov/od/id/mds2-3116
language {en}
license https://www.nist.gov/open/license
modified 2023-11-24 00:00:00
programCode {006:045}
publisher National Institute of Standards and Technology
references {https://dx.doi.org/10.1088/2051-672X/ad44bb}
resource-type Dataset
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Gruppi
  • AmeriGEOSS
  • National Provider
  • North America
Tag
  • AmeriGEO
  • AmeriGEOSS
  • CKAN
  • GEO
  • GEOSS
  • National
  • North America
  • United States
  • coherent
  • interferometry
  • microscopy
  • scanning
isopen False
license_id other-license-specified
license_title other-license-specified
maintainer Thomas A. Germer
maintainer_email thomas.germer@nist.gov
metadata_created 2025-09-24T04:33:45.461332
metadata_modified 2025-09-24T04:33:45.461345
notes This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.
num_resources 1234
num_tags 12
title Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"