NIST Electron Elastic-Scattering Cross-Section Database - SRD 64, Version 4.0

Note that this SRD supersedes SRD 64 Version 3.2. The NIST Electron Elastic-Scattering Cross-Section Database provides values of differential elastic-scattering cross sections, total elastic-scattering cross sections, phase shifts, and transport cross sections in electron-atom scattering for elements with atomic numbers from 1 to 96 and for electron energies between 50 eV and 300 keV (in steps of 1 eV). Knowledge of elastic-scattering effects is important for the development of theoretical models for quantitative analysis by Auger-electron spectroscopy, X-ray photoelectron spectroscopy, electron microprobe analysis, and analytical electron microscopy. These data are also needed for modeling of electron transport in radiation dosimetry, electron-beam lithography, and interactions of ionizing radiation with matter. The database is designed to facilitate simulations of electron transport for these and similar applications in which electron energies from 50 eV to 300 keV are utilized. An analysis of available elastic-scattering cross-section data has been published [A. Jablonski, F. Salvat, and C. J. Powell, J. Phys. Chem. Ref. Data 33, 409 (2004)].