X-ray Metrology for the Semiconductor Industry Tutorial

Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry

Data and Resources

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landingPage https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology
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license https://www.nist.gov/open/license
modified 2018-12-01
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  • AmeriGEOSS
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  • North America
  • United States
  • dimensional-metrology
  • semiconductor-metrology
  • small-angle-x-ray-scattering
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license_id other-license-specified
license_title other-license-specified
maintainer Regis Kline
maintainer_email r.kline@nist.gov
metadata_created 2025-09-24T17:37:12.982090
metadata_modified 2025-09-24T17:37:12.982102
notes Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry
num_resources 1
num_tags 11
title X-ray Metrology for the Semiconductor Industry Tutorial