NIST Electron Effective-Attenuation-Length Database - SRD 82

The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].

Data and Resources

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identifier ECBCC1C130092ED9E04306570681B10715
landingPage https://www.nist.gov/srd/nist-standard-reference-database-82
language {en}
license https://www.nist.gov/open/license
modified 2011-01-01 00:00:00
programCode {006:052}
publisher National Institute of Standards and Technology
references {https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf,https://dx.doi.org/10.1116/1.3071947}
resource-type Dataset
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Groups
  • AmeriGEOSS
  • National Provider
  • North America
Tags
  • amerigeo
  • amerigeoss
  • auger-electron-spectroscopy
  • ckan
  • depth-distribution-function
  • effective-attenuation-length
  • electron-spectroscopy-for-chemical-analysis
  • esca
  • geo
  • geoss
  • material-database
  • national
  • north-america
  • photoelectron
  • photoelectron-spectroscopy
  • photoemission
  • surface-analysis
  • united-states
  • x-ray-photoelectron-spectroscopy
  • xps
isopen False
license_id other-license-specified
license_title other-license-specified
maintainer Cedric J. Powell
maintainer_email cedric.powell@nist.gov
metadata_created 2025-11-20T21:23:56.686214
metadata_modified 2025-11-20T21:23:56.686218
notes The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].
num_resources 2
num_tags 20
title NIST Electron Effective-Attenuation-Length Database - SRD 82