NIST Electron Inelastic-Mean-Free-Path Database - SRD 71

The NIST Electron Inelastic-Mean-Free-Path Database provides values of electron inelastic mean free paths (IMFPs) principally for use in surface analysis by Auger-electron spectroscopy and X-ray photoelectron spectroscopy. The database includes IMFPs calculated from experimental optical data and IMFPs measured by elastic-peak electron spectroscopy. If no calculated or measured IMFPs are available for a material of interest, values can be estimated from the predictive IMFP formulae of Tanuma et al. and of Gries. IMFPs are available for electron energies between 50 eV and 10,000 eV although most of the available data are for energies less than 2,000 eV. A critical review of calculated and measured IMFPs has been published [C. J. Powell and A. Jablonski, J. Phys. Chem. Ref. Data 28, 19 (1999)].

Data and Resources

Field Value
accessLevel public
accrualPeriodicity irregular
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identifier ECBCC1C130082ED9E04306570681B10714
landingPage https://www.nist.gov/srd/nist-standard-reference-database-71
language {en}
license https://www.nist.gov/open/license
modified 2010-12-01 00:00:00
programCode {006:052}
publisher National Institute of Standards and Technology
references {https://www.nist.gov/system/files/documents/srd/SRD71UsersGuideV1-2.pdf,https://dx.doi.org/10.1063/1.556035}
resource-type Dataset
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theme {"Standards:Reference data"}
Groups
  • AmeriGEOSS
  • National Provider
  • North America
Tags
  • amerigeo
  • amerigeoss
  • auger-electron
  • auger-electron-spectroscopy
  • ckan
  • electron-spectroscopy-for-chemical-analysis
  • esca
  • geo
  • geoss
  • inelastic-mean-free-path
  • material-database
  • national
  • north-america
  • photoelectron
  • photoelectron-spectroscopy
  • photoemission
  • surface-analysis
  • united-states
  • x-ray-photoelectron-spectroscopy
  • xps
isopen False
license_id other-license-specified
license_title other-license-specified
maintainer Cedric J. Powell
maintainer_email cedric.powell@nist.gov
metadata_created 2025-11-20T04:15:42.509225
metadata_modified 2025-11-20T04:15:42.509229
notes The NIST Electron Inelastic-Mean-Free-Path Database provides values of electron inelastic mean free paths (IMFPs) principally for use in surface analysis by Auger-electron spectroscopy and X-ray photoelectron spectroscopy. The database includes IMFPs calculated from experimental optical data and IMFPs measured by elastic-peak electron spectroscopy. If no calculated or measured IMFPs are available for a material of interest, values can be estimated from the predictive IMFP formulae of Tanuma et al. and of Gries. IMFPs are available for electron energies between 50 eV and 10,000 eV although most of the available data are for energies less than 2,000 eV. A critical review of calculated and measured IMFPs has been published [C. J. Powell and A. Jablonski, J. Phys. Chem. Ref. Data 28, 19 (1999)].
num_resources 2
num_tags 20
title NIST Electron Inelastic-Mean-Free-Path Database - SRD 71